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主要产品

半导体

Chamber

300mm WaferTransfer Module Chamber

Chamber

300mm Wafer Transfer Module Chamber

Chamber

300mm Wafer Transfer Module Chamber

Chamber

300mm Wafer Transfer Module Chamber

Chamber

Load Lock Chamber

Chamber

Chamber

SUS CHAMBER

Display panel transfer moulde chamber

LOAD LOCK

300mm Wafer Load Lock Chamber

PROCESS CHAMBER

300mm wafer process chamber

MAIN BASE

300mm wafer process chamber

LAMP HOUSING

300mm wafer heating part

LAMP HOUSING

300mm wafer heating part

MAGLEV ROTOR

300mm wafer heating part

SHOWER HEAD

300mm Wafer Shower Head

LINER HEATER

LINER HEATER

AF HEATER

300mm 반도체

SPURA HEATER

300mm 반도체

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